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80A High Current TLP/HMM Test System TLP-8010A
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Wafer, package and system level TLP/HMM testing
Fast 50 Ω high voltage pulse output with typically 300 ps rise time
Up to 90 kW peak output power into 50 Ω load
Built-in HMM pulse up to ±16 kV with 100 Ω configuration
High pulse output current up to ±80 A (short circuit) with 6 dB reflection suppression
6 GPIB programmable pulse rise times: 300 ps to 50 ns
1 built-in pulse width: 2 ns plus 100 ns with one external charge line cable
Optional external pulse width extensions from 2 ns to 500 ns using the pulse width extender TLP-8012A5
Fast measurement time, typically 0.5 s per pulse including one-point DC measurement between pulses
Reverse recovery measurement capabilities in the range of ns up to µs
High-Voltage DMOS SOA measurements
Efficient MATLAB?-based software for system control and waveform data management
The software can control automatic probers for fast measurements of complete wafers
High performance and high quality components
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Pulse Width Extender TLP-8012A5
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Features of the System
- Pulse width extender for the 80A high current TLP/HMM
test system TLP-8010A
- 6 manual selectable pulse width: 5, 10, 50, 100,
200 and 500ns
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ATS-8300G
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320mmAutomated Test System:
• 320mmX/Y-travel microporous ceramic compound vacuum chuck,
linear motor, linear scale encoder
• Two 110mmx 110mmx 40mmX/Y/Z probe-arm bottom-up motors including:
– linear scale encoders
– probearm fixture platform
– touch-down probe needle force sensor
• Moving target video camera system
• Motion controller
• Honeycomb breadboard 1000mmx 800mmx 70mm
• Accessories fixture kit
• 2 x TPA-GFG probe arm kit
• Table support
• Safety shut-down
• Dark box
• HPPI automation software including collision avoidance
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80A High Current TLP/VF-TLP/HMM Test System TLP-8010C
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Wafer, package and system level TLP/VF-TLP/HMM testing
Combines TLP-8010A and TLP-3010C into one system
Can be operated together with TLP-8012A5 and TLP-3011C
pulse width extenders
Ultra fast 50 Ω high voltage pulse output with typical rise time
100 ps (0-30 A) and 300 ps (> 30 A)
Up to 90 kW peak output power into 50 Ω load
Built-in HMM pulse up to ±16 kV with 100 Ω configuration
High pulse output current up to ±80 A (short circuit) with
6 dB reflection suppression
High speed 50 Ω trigger output for oscilloscopes
(synchronous to high voltage pulse output)
6 GPIB programmable pulse rise times: 100 ps to 50 ns
8 programmable pulse widths: 1 ns to 100 ns (0-30 A),
1 built-in pulse width: 2 ns (> 30 A)
The optional pulse width extender TLP-3011C enables pulse
width up to 1.6 µs in 68 GPIB programmable steps (0-30 A)
Optional external pulse width extensions from 2 ns to 500 ns
(> 30 A) using the external pulse width extender TLP-8012A5
Fast measurement time, typically 0.5 s per pulse including one-point
DC measurement between pulses
Reverse recovery measurement capabilities in the range of ns up to µs
High-Voltage DMOS SOA measurements
Efficient MATLAB?-based software for system control and waveform data management
The software can control automatic probers for fast measurements of complete wafers
High performance and high quality components
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30A TLP/VF-TLP/HMM Test System TLP-3010C/3011C
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Pulse System TLP-3010C/3011C for the following applications fields:
- ESD robustness characterization on wafer-, chip- and board-level by TLP/vf-TLP/HMM pulse types
- Safe-Operating-Area (SOA) measurements of active and passive devices from 1 ns to 1.6 µs pulse width
- Reverse and forward recovery measurements of diodes from 200 ps to 1 µs
- Breakdown and turn on/off characteristics of devices
- Measurement of the impulse response
Features of the System
- Wafer and system level TLP/VF-TLP/HMM test system
- Ultra fast 50 Ω pulse output with 100 ps rise time
- Built-in HMM (IEC 61000-4-2) pulse up to ±8 kV
- High pulse output current up to ±30 A
- 6 programmable pulse rise-times: 100 ps to 45 ns
- 8 programmable pulse widths: 1 ns to 100 ns
- Optional pulse width extender increases pulse width up to 1.6 µs in 68 GPIB programmable steps
- Fast measurement time, typically 0.5 s per pulse including one-point DC measurement between pulses
- Efficient MATLAB?-based software for system control and waveform data management
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AutomatedTestSystem ATS-8000A
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The ATS-8000A test system is a fully automated 2-pin probing solution for HBM, TLP ,HMM and CC-TLP on package-and waferlevel. Future extension for CDM is optional.
The vacuum rotary stage can be configured for any package shape, any package size and wafers.
The probe force sensors ensures maximum probe tip life time and avoid job interruption.
The 3-axis motion systems and rotary stage are designed for ultra-fast speed to maximize throughput.
The user interface and data management is based on HPPI standard software.
Easy to use, rugged high quality components, high throughput.
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TLP-12010C
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120 A High Voltage 50 Ω Pulse Generator
Features
- High pulse output current up to 120 A (short circuit)
- Ultra-fast 50 Ω high voltage pulse output with typical rise time 100 ps (0 A to 40 A) and 300 ps in high-current mode (0 A to 120 A)
- Wafer, package and system level TLP, VF-TLP and HMM testing
- Up to 180 kW peak output power into 50 Ω load
- Built-in HMM pulse up to ±32 kV in 50 Ω-configuration
- High speed 50 Ω trigger output for oscilloscopes (synchronous to high voltage pulse output)
- 6 USB programmable pulse rise times: 100 ps to 50 ns (custom selectable)
- 8 (optional 9) programmable pulse widths: 0.5 ns (optional), 1 ns to 100 ns (0 A to 40 A), 1 built-in pulse width: 100 ns (>40 A)
- The optional pulse width extender TLP-3011C enables pulse width up to 1.6 µs in 68 GPIB programmable steps (0 A to 40 A)
- Optional external pulse width extensions from 5 ns to 500 ns (>40 A to 120 A)using the external pulse width extender TLP-12012A6
- Built-in pulse reflection suppression
- Fast measurement time, typically less than 0.2 s per pulse including one-point DC measurement between pulses
- Efficient sofware for system control and waveform data management
- The sofware can control automatic probers for fast measurements of complete wafers
- Combines TLP-12010A and TLP-4010C into one system
- Can be operated together with TLP-12012A6 and TLP-3011C pulse width extenders
- Integrated interlock safety shut-down
- Industrial isolated and EMI/ESD protected USB control interface
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TLP-12010A
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High Voltage 50 Ω Pulse Generator
Features
- High pulse output current up to ±120 A (short circuit)
- Ultra-fast 50 Ω high voltage pulse output with typical 300 ps rise time
- Wafer, package and system level TLP and HMM testing
- 180 kW peak output power into 50 Ω load
- Built-in HMM pulse up to ±32 kV in 50 Ω-configuration
- High speed 50 Ω trigger output for oscilloscopes (synchronous to high voltage pulse output)
- 6 digital programmable pulse rise times out of: 300 ps to 50 ns (optional)
- 1 built-in pulse width: 100 ns
- Optional external pulse width extensions from 5 ns to 500 ns using the external pulse width extender TLP-12012A6
- Built-in pulse reflection suppression
- Fast measurement time, typically less than 0.2 s per pulse including one-point DC measurement between pulses
- Efficient software for system control and waveform data management
- The software can control automatic probers for fast measurements of complete wafers
- Integrated interlock safety shut-down
- Industrial isolated and EMI/ESD protected USB control interface
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ATS-8000G
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110mmAutomated Test System:
• Two 110mmX/Y-stages , linear scale encoder
• Two 40mmZ-stages, motor encoder
– Probearm fixture platform
– Touch-down probe needle force sensor
• 2 x TPA-GFG probe arm kit
• Microporous ceramic compound vacuum chuck 160mmx 160mm
• Moving target video camera system
• Motion controller
• Honeycomb breadboard 1000mmx 800mmx 70mm
• Accessories fixture kit
• Table support
• Safety shut-down light curtain (optional)
• HPPI automation software
Note: Darkbox not included.
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HBM-S1-B
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The HBM-S1-B is a 2-pin HBM test probehead according ANSI/ESDA/JEDEC JS-001 standard with C=100 pF, R=1.5 kΩ discharge network up to ±6 kV. The HBM-S1-B can be used as an optional extension (upgrade on request) for all HPPI TLP-3010C, 4010C, 8010A/C, and TLP-12010A/C pulse generators to provide VF-TLP/TLP/HMM and HBM in a single test system.
Features
• ±6 kV Human-Body-Model (HBM) 2-pin tester probehead
according ANSI/ESDA/JEDEC JS-001 standard
with C=100 pF, R=1.5 kΩ discharge network
• Optionally available upgrade for all HPPI TLP-3010C,
4010C, 8010A/C, and TLP-12010A/C hardware systems
and software (upgrade on request)
• TrueHBM– the classical discharge network of the HBMS1-
B according the normative standard ensures compliant
waveforms for all load conditions
• Suppression of trailing pulses
• Integrated charge removal resistor
• Integrated DUT voltage and DUT current sensor for real
time voltage and current monitoring
• Integrated DC test DUT switch
• Integrated hardware 50Ω trigger output for high speed
digital oscilloscopes
• Integrated overvoltage protection of voltage sense, current
sense and DC test interfaces for oscilloscope and
SMU protection during high voltage HBM testing
• Fast and efficient HBM measurements including transient
waveform data management using the standard
HPPI TLP software
• Compact size 145mmx 82.5mmx 44mm
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HBM-S1-C
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The HBM-S1-C is a 2-pin HBM test probehead according ANSI/ESDA/JEDEC JS-001 standard with C=100 pF, R=1.5 kΩ discharge network up to ±10 kV. The HBM-S1-C can be used as an optional extension (upgrade on request) for all HPPI TLP-3010C, 4010C,
8010A/C and TLP-12010A/C pulse generators to provide VF-TLP/TLP/HMM and HBM in a single test system.
Features
• ±10 kV Human-Body-Model (HBM) 2-pin tester probehead
according ANSI/ESDA/JEDEC JS-001 standard
with C=100 pF, R=1.5 kΩ discharge network
• Optionally available upgrade for all HPPI TLP-3010C,
4010C, 8010A/C and 12010A/C hardware systems and
software (upgrade on request)
• TrueHBM– the classical discharge network of the HBMS1-
C according the normative standard ensures compliant
waveforms for all load conditions
• Suppression of trailing pulses
• Integrated charge removal resistor
• Integrated DUT voltage and DUT current sensor for real
time voltage and current monitoring
• Integrated DC test DUT switch
• Integrated hardware 50Ω trigger output for high speed
digital oscilloscopes
• Integrated overvoltage protection of voltage sense, current
sense and DC test interfaces for oscilloscope and
SMU protection during high voltage HBM testing
• Fast and efficient HBM measurements including transient
waveform data management using the standard
HPPI TLP software
• Compact size 145mmx 82.5mmx 94mm
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HBM-SM30-B
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30-pin HBM Tester ANSI/ESDA/JEDEC JS-001
Features
• 30 V to 10 kV HBM matrix tester
according ANSI/ESDA/JEDEC JS-001
• 30-pin switch matrix
• SULLINS FMM15DRKH (2x15 pin) DUT board female
card edge connector at 0.156 " (3.96 mm) pin pitch
• Pogo-pin card edge connector exchange carrier
• DC test (pre/post spots and sweeps)
• Transient HBM current and voltage monitoring
• Industrial USB control interface
• Safety interlock lid
• Switch matrix self test
• Software control, test definition and evaluation:
– Pin map generator
– Test definition and setup, such as
ANSI/ESDA/JEDEC JS-001 table 2A, 2B
– Real-time task view
– Measurement data analysis and storage
• 19"-rack: (W) 553mmx (H) 1333mmx (D) 675mm
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HBM-TS10-A
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ANSI/ESDA/JEDEC JS-001 HBM 2-Pin Tester
• HBM pulse unit HBM-S1-B
• high voltage controller HV-CU10-A
• external DUT-switch S-3000C-LT for 4-wire setup (optional)
• HPPI unified tester software GUI including remote control API
• 1 pcs. 10 dB, 18 GHz SMA attenuator type 18AH-10
• 1 pcs. control cable PCC-200A
• 4 pcs. flexible RG188A/U SMA(m)/SMA(m) 50Ω cable, 2 m, RG188-2m
• 1 pcs. high voltage cable HV10-300A
• 1 pcs. memory stick with software and manuals (16 GB Transcend)
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HBM-VT
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The HBM-VT is a programmable load impedance for compliance verification of 2-pin human body model (HBM) pulse generators according ANSI/ESDA/JEDEC JS-001 standard with C=100 pF, R=1.5 kΩ discharge network up to ±10 kV.
Features
• HBM pulse generator verification tester according
ANSI/ESDA/JEDEC JS-001 up to ±10 kV
• To be used inHBMtest and qualification labs for regular
pulse generator specification compliance test in order
to fulfill lab audit and certification requirements
• Fully automatic compliance test and verification ofHBM
pulse generators regarding ANSI/ESDA/JEDEC JS-001
normative standard at 3 different load conditions:
1. Short Circuit
2. 500Ω
3. Low capacitance transient voltage suppressor
(TVS) diode type AQ3530-01LTG (Littlefuse) at
VBR = 8.5 V reverse breakdown voltage, including
DC test
• Electrically floating (no fixed system ground)
• Isolated industrial full-speed USB control interface
• Parameter evaluation and verification of the transient
HBM current waveforms:
1. Peak Current
2. Rise Time
3. Decay Time
4. Maximum Ringing Current
• Fully automatic test report generation (PDF, see Fig. 4)
• Optionally available upgrade for all HPPI TLP-3010C,
4010C, 8010A, 8010C, HBM-TS10-A hardware systems in
combination with HBM-S1-B (6 kV) pulse generators
• Built-in current sensor with 1 V/A sensitivty
• Compact size 126mmx 82.5mmx 44.5mm
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HIT-526A
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High Impedance Transformer (50Ω to 526Ω)
Features
• Combined switch for 50Ω and 526Ω standard and high
impedance TLP measurements
• SMA interface
• SMA-to-cable interface (optional)
• DC to 2.8 GHz (−3 dB) 50Ω bandwidth (at SMA interfaces)
• Controlled automatically by the TLP software
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PHD-4001A
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The PHD-4001A is a multi-purpose, high-performance probe which can be used for VF-TLP/TLP/HMM/HBM force/sense probing,
as well as general RF measurements using the GGB Picoprobe Model 10® replacement probetips.
Features
• Electrically isolated probearm kit for VF-TLP, TLP, HMM, HBM force and sense probing
based on the GGB Picoprobe Model 10® replacement probe tips
• Buried coaxial cable channel for thermo-chuck in isolated chamber temperature
measurements
• Compatible with GGB Picoprobe Model 10® replacement probetips
• Compatible with all standard micropositioner interfaces
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Sealing Kit PHD-4001-TH-Seal
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• Sealing Kit for PHD-PPM10-H9 on Cascade Octagon CM300 probe station
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TLP-4010C / 3011C
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TLP/VF-TLP/HMM Test System
The universal TLP/VF-TLP/HMM test system TLP-4010C/3011C offers advanced features intended for the characterization of circuits, semiconductor devices and discretes like TVS, varistors, capacitors, in the high power time domain.
Features
• Wafer and package level TLP/VF-TLP/HMM testing
• Ultra fast 50Ω high voltage pulse output with typical
100 ps rise time
• Built-in HMM (IEC 61000-4-2) pulse up to ±10 kV
• High pulse output current up to ±40 A
• High speed 50Ω trigger output for oscilloscopes (synchronous
to high voltage pulse output)
• 6 programmable pulse rise times: 100 ps to 50 ns
• 8 (optional 9) programmable pulse widths: 0.5 ns (optional),
1 ns to 100 ns
• Optional pulse width extender increases pulse width up
to 1.6 μs in 68 programmable steps
• Fast measurement time, typically 0.2 s per pulse including
one-point DC measurement between pulses
• Efficient software for system control and waveform data
management
• The software can control automatic probers (Suss) for
fast measurement of complete wafers
• High performance and high quality components
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TLP-8010C
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80A TLP/VF-TLP/HMM Test System
The high-current TLP/VF-TLP/HMM test system TLP-8010C combines the performance of the TLP-8010A and TLP-4010C system.
Features
• Wafer, package and system level TLP, VF-TLP and HMM
testing
• Combines TLP-8010A and TLP-4010C into one
system
• Can be operated together with TLP-8012A5 and TLP-
3011C pulse width extenders
• Ultra fast 50Ω high voltage pulse output with typical rise
time 100 ps (0 A to 40 A) and 300 ps (>40 A)
• Up to 80 kW peak output power into 50Ω load
• Built-inHMMpulse up to ±15 kV with 100Ω-configuration
• High pulse output current up to ±80 A (short circuit) with
6 dB reflection suppression
• High speed 50Ω trigger output for oscilloscopes (synchronous
to high voltage pulse output)
• 6 digital programmable pulse rise times: 100 ps to 50 ns
• 8 (optional 9) programmable pulse widths: 0.5 ns (optional),
1 ns to 100 ns (0 A to 40 A), 1 built-in pulse width:
100 ns (0 A to 80 A)
• The optional pulse width extender TLP-3011C enables
pulse width up to 1.6 μs in 68 digital programmable steps
(0 A to 40 A)
• Optional external pulse width extensions from 5 ns to
500 ns (0 A to 80 A) using the external pulse width extender
TLP-8012A5
• Built-in pulse reflection suppression
• Fast measurement time, typically less than 0.2 s per
pulse including one-point DC measurement between
pulses
• Efficient software for system control and waveform data
management
• The software can control automatic probers for fastmeasurements
of complete wafers
• Industrial isolated and protected USB 2.0 interface
• High performance and high quality components
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TLP-12010A
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120 A TLP/HMM Test System
The high-current TLP/HMM test system TLP-12010A offers advanced features intended for the characterization of semiconductor devices, discrete components, such as TVS, varistors, capacitors, gas tubes, circuits and systems in the high power time domain.
Features
• High pulse output current up to ±120 A (short circuit)
• Ultra-fast 50Ω high voltage pulse output with typical
300 ps rise time
• Wafer, package and system level TLP and HMM testing
• 180 kW peak output power into 50Ω load
• Built-in HMM pulse up to ±32 kV in 50Ω-configuration
• High speed 50Ω trigger output for oscilloscopes (synchronous
to high voltage pulse output)
• 6 digital programmable pulse rise times out of: 300 ps to
50 ns (optional)
• 1 built-in pulse width: 100 ns
• Optional external pulse width extensions from 5 ns to
500 ns using the external pulse width extender TLP-
12012A6
• Built-in pulse reflection suppression
• Fast measurement time, typically less than 0.2 s per
pulse including one-point DC measurement between
pulses
• Efficient software for system control and waveform data
management
• The software can control automatic probers for fastmeasurements
of complete wafers
• Integrated interlock safety shut-down
• Industrial isolated and EMI/ESD protected USB control
interface
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TLP-12012A6
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Manual Pulse Width Extender
The pulse width extender TLP-12012A6 is used to extend the pulse with of the TLP-12010A/C high-current TLP/HMM test system from 5 ns, 10 ns, 50 ns, 100 ns, 200 nss up to 500 ns in 6 steps.
Features
• Manual pulse width extender for the high current
TLP/HMM test systems TLP-12010A and TLP-12010C
• 6 manual selectable pulse width: 5, 10, 50, 100, 200 and
500 ns (optional up to 2 μs on request)
• High pulse output current up to ±120 A
• High voltage BNC connectors
• High performance and high quality components
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TLP-16010A
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4 kV High Voltage Pulse Generator
High voltage pulse generator TLP-16010A including software driver for stand-alone operation
Features
• High voltage transmission line pulse (TLP) generator
• Rectangular pulse shape
• 50Ω high voltage TNC pulse output connector
• ±4 kV output voltage (50Ω output load)
• ±160 A output current (output short circuit)
• 320 kW peak pulse output power into 50Ω load
• 0.6 ns to 50 ns digital programmable pulse rise time in 6 custom selectable steps
• 100 ns pulse width
• Optional Human Metal Model (HMM) pulse shape, equivalent to ±43 kV according IEC 61000-4-2 (330Ω, 150 pF)
• Optional external manual pulse width extender TLP-16012A for 10 ns to 1000 ns pulse width
• 5 Hz pulse repetition frequency
• High speed 50Ω, 1 V trigger output for digital oscilloscopes (synchronous to high voltage pulse output)
• Software driver for stand-alone operation
• Efficient software for system control, waveform analysis and waveform data management (optional)
• Integrated interlock safety shut-down
• Industrial isolated and EMI/ESD protected USB control interface
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